Surface roughness measurement

To measure quality of optically polished surfaces we use Zygo NewView 7100 profilometer and roughness measuring device based on the white light interferometry:

  • Roughness measurement RMS from 0,1 Å (0,01 nm)
  • Maximum height profiles app. 1 mm
  • Camera resolution 992 x 992 px
  • Motorized table 150 x 150 mm allows use of stitching function and pattern function, tilt of the table is ± 4°, max sample height 120mm
  • Used objectives: 2,5x, 10x, 50x